
- Koch, Frieder Johannes
X-ray optics made by X-ray lithography: Process optimization and quality control
- Dissertationsschrift
- Kartoniert,
- KIT Scientific Publishing
- (2017)
Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work.
Grating based X-ray phase contrast im ...
DETAILS
- X-ray optics made by X-ray lithography: Process optimization and quality control
- Dissertationsschrift
- Koch, Frieder Johannes
- Kartoniert, 170 S.
- graph. Darst.
- Sprache: Englisch
- 21 cm
- ISBN-13: 978-3-7315-0679-9
- Titelnr.: 66491083
- Gewicht: 325 g
- KIT Scientific Publishing (2017)
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